- wafer-stepping lithography
- литография с последовательным шаговым экспонированием всей пластины
The New English-Russian Dictionary of Radio-electronics. F.V Lisovsky . 2005.
wafer-stepping lithography
Смотреть что такое "wafer-stepping lithography" в других словарях:
Stepper — A stepper is a device used in the manufacture of integrated circuits (ICs) that is similar in operation to a slide projector or a photographic enlarger. Steppers are an essential part of the complex process, called photolithography, that creates… … Wikipedia
